The semi-conductor industry uses a variety of vapor deposition technologies to create products. Some of these technologies use silane and phosphine. There are also derivatives of these chemicals used in these processes.
These chemicals are very hazardous at very low concentrations. Ino-Tek has worked with lab managers, architects, and safety professionals to develop gas detection strategies for these applications. These technologies commonly use a blend of detection technologies, each designed to address one specific hazard.
Ino-Tek has extensive experience with this application and can design an appropriate gas detection system for any vapor deposition system.